Ithagethi yentsimbi yokujikeleza
Ingcaciso yeMveliso
Ithagethi ye-Metal Rotary
Imimandla yemagnethi ye-Orthogonal kunye nombane isetyenziswa phakathi kwethagethi ye-sputtering (cathode) kunye ne-anode.Kwaye ugcwalise igesi ye-inert efunekayo (ngokuqhelekileyo i-Ar gas) kwigumbi eliphezulu le-vacuum.Ngaphantsi kwesenzo sentsimi yombane, i-Ar gas i-ionized ibe yi-ion kunye nee-electron.I-voltage ethile engalunganga ephezulu isetyenziswa ekujoliswe kuyo, ii-electron ezikhutshwa yithagethi zichatshazelwa ngumhlaba wamagnetic, amathuba e-ionization yokwanda kwegesi esebenzayo, iplasma yoxinaniso oluphezulu lwenziwa kufutshane necathode, kwaye ii-Ar ions ziyachaphazeleka. ngamandla kaLorentz.Emva koko khawulezisa ukubhabha ukuya kwindawo ekujoliswe kuyo, kwaye ubhobhoze indawo ekujoliswe kuyo ngesantya esiphezulu, ukuze iiathom ezichithakeleyo kwindawo ekujoliswe kuyo zilandele umgaqo woguqulo lwesantya, zibhabhe ukusuka kwindawo ekujoliswe kuyo ukuya kwi-substrate, kwaye ufake ifilimu yamandla ekinetic ephezulu.
Ukuze kuphuculwe ngakumbi umlinganiselo wokusetyenziswa kwezinto ezijoliswe kuzo, i-cathode ejikelezayo enokusetyenziswa ngokufanelekileyo kwenzelwe, kwaye i-tubular target material isetyenziselwa ukugubungela i-sputtering.Ukuphuculwa kwezixhobo zokutshiza kufuna ukuba into ekujoliswe kuyo itshintshwe ukusuka kwimo esicaba ukuya kwimilo ye-tubular, kwaye izinga lokusetyenziswa kwethagethi ejikelezayo ye-tubular ingaba phezulu ukuya kuma-70%, osombulula ingxaki yokusetyenziswa okuphantsi kwethagethi ye-flat.
| Igama lemveliso | Ithagethi yentsimbi yokujikeleza |
| Izinto eziphathekayo | W, Mo, Ta, Ni, Ti, Zr, Cr, TiAl |
| Ubungakanani bentengiso eshushu | ID-133/ OD-157x 3191mm ID-133 / OD-157 X 3855mm ID-160/OD-180x1800mm Isenokwenziwa kwakhona ngokweemfuno ezithile zabathengi |
| MOQ | Iziqwenga ezi-3 |
| Iphakheji | Ityala leplanga leplanga |
Qaphela: Sivelisa ubukhulu becala iithagethi ezahlukeneyo zetsimbi, nceda uqhagamshelane nathi ngeenkcukacha.
Isicelo
I-Sputtering coating luhlobo olutsha lwendlela yokwaleka umphunga womzimba.Xa kuthelekiswa nendlela yokugquma kwamanzi, ineengenelo ezicacileyo
kwiinkalo ezininzi.Iithagethi zokutshiza ngesinyithi zisetyenziswe kwiindawo ezininzi.Usetyenziso oluphambili lwethagethi ejikelezayo.
■Iiseli zelanga
■iglasi Architectural
■Iglasi yemoto
■Semiconductor
■I-TV yesikrini esisicaba, njl
Ulwazi lweodolo
Imibuzo kunye nemiyalelo kufuneka ibandakanye ulwazi olulandelayo:
☑I-ID yenkcazo ekujoliswe kuyo×OD×L (mm).
☑Ubungakanani obufunekayo.
☑Nceda uqhagamshelane nathi ngezidingo ezizodwa ezingaphezulu.
